Pneumatic PFA Diaphragm Valves

Overview

Anhui Xinfulong's Pneumatic PFA Diaphragm Valves are engineered for reliable on/off control in ultra-high purity (UHP) and aggressive fluid handling applications-. Constructed from injection-molded, high-purity PFA with a virgin PTFE diaphragm, our valves deliver exceptional chemical resistance, ultra-low contamination, and long cycle life — making them the ideal choice for semiconductor manufacturing, wet chemical processing, pharmaceutical, and other demanding industries.

PFA (Perfluoroalkoxy) is a fully fluorinated polymer specifically tailored to meet the semiconductor industry's needs for high purity and minimum extractables-. The superior strength of the C–F bond in PFA ensures zero leaching from virtually all fluids, making it the material of choice for handling high-concentration acids, bases, clear chemistries, and slurries--2. Our pneumatic diaphragm valves leverage these inherent advantages while incorporating precision-engineered sealing technologies to deliver maintenance-free, leak-tight performance in the most critical process applications.

Key Features

Superior Chemical Resistance & Ultra-High Purity

• All wetted surfaces are constructed from high-purity PFA and modified PTFE — no metal contact with process media

• Inert to virtually all chemicals, including concentrated acids (H₂SO₄, HCl, HNO₃, HF), bases, solvents, and aggressive etchants

• Zero leaching and ultra-low extractables — the superior strength of the C–F bond in PFA ensures no contamination contribution to the fluid

• Meets the stringent purity standards of semiconductor fabrication, including advanced node processes

Advanced Diaphragm Technology

• One-piece machined modified PTFE diaphragm provides superior flexibility and higher cycle life than conventional PTFE

• Patent-protected rolling diaphragm technology ensures reliable performance and extended service life

• Tongue and groove seal design ensures a positive diaphragm-to-body seal, resulting in high cycle life, lower replacement costs, and complete isolation of process media from the actuator

• Available in both 2-way and 3-way configurations to suit diverse flow control requirements

Precision-Engineered Construction

• Molded PFA body with precision-machined sealing areas for superior leak integrity

• Fluoropolymer-coated stainless steel spring reduces the effects of corrosive environments and ensures compatibility with a wide range of aggressive process media

• Smooth bore and fully swept flow path minimizes particle entrapment areas and prevents stagnation

• Dual point seal design provides double the sealing power

• 100% leak tested to guarantee performance

Compact & High-Flow Design

• Compact footprint with maximum flow capability — computational fluid dynamics software utilized to maximize flow through the valve

• Full port design with no flow restrictions

• Available with a true lock-out, tag-out (LOTO) design for enhanced safety

• Meets SEMI-F57-0301 Standards

Technical Specifications

Available Configurations

Port Connection Options

Applications

Our Pneumatic PFA Diaphragm Valves are widely deployed in static-sensitive and high-purity applications:

Semiconductor Manufacturing

• High-purity chemical delivery lines for wet etching, wafer cleaning, and photoresist processing-

• Ultra-pure water (UPW) and chemical distribution systems

• Chemical Mechanical Polishing (CMP) slurry delivery

• Tool hook-ups and valve manifold boxes (VMBs)

• Clear chemistries for semiconductor processes

Wet Electronic Chemicals

• Transfer and distribution lines for high-purity acids, bases, and solvents

• Chemical blending and distribution systems

• High-purity reagent feed lines

Pharmaceutical & Biotech

• High-purity fluid transfer with zero contamination risk

• FDA-compliant processing lines

Chemical Processing

• Corrosive chemical handling in aggressive environments

• Waste liquid piping and chemical piping lines where fluid hazards are high

Analytical & Laboratory

• Laboratory equipment and analytical instrumentation

Why Choose Xinfulong Pneumatic PFA Diaphragm Valves?

• Ultra-High Purity — All wetted surfaces are PFA and modified PTFE, ensuring zero metal ion contamination and ultra-low extractables

• Superior Chemical Resistance — Inert to virtually all chemicals, including concentrated acids, bases, and aggressive solvents

• Long Cycle Life — Modified PTFE diaphragm and fluoropolymer-coated spring provide exceptional resistance to corrosion and extended service life

• Leak-Tight Performance — Precision-machined sealing areas and tongue and groove seal design ensure superior leak integrity

• Bidirectional Pressure Rating — Fully functional from vacuum to 120 psig

• Cleanroom Manufacturing — Critical production processes carried out in Class 1000/10,000 cleanrooms, ensuring the highest levels of purity

• Industry-Leading Expertise — Backed by decades of fluoropolymer processing experience and R&D collaboration with Japanese and Korean experts

• Proven Global Track Record — Trusted by clients across Europe, Japan, Korea, Taiwan (China), and beyond

• Comprehensive Quality Assurance — ISO 9001, ISO 14001, ISO 45001 certified with 100% leak testing

• End-to-End Service — From custom design and material selection to manufacturing, testing, and after-sales support

Customization Options

We offer fully customizable pneumatic PFA diaphragm valves to meet your specific requirements:

• 2-way or 3-way configurations

• Multiple port connection options (Parflare, Parbond, Flare, FNPT)

• Normally closed or normally open actuation

• Submergible option for corrosive environments

• Custom port sizes and connection configurations

• PVDF or PFA nut materials